Ceramic plate and ring for polishing sapphire wafer
We are supplying customers ceramic plates for CMP polishing with
various outer diameter and thickness.
This plates with
high flatness and parallelism, compact and uniform
microstructure ,could be used for CMP polishing of 3,4,5,6,8,12 inch wafer.
Spare parts of Ceramic plates and ring for polishing can be
custom made
according to customers’ requirement.
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