ULTRA-FLAT CERAMIC VACUUM CHUCKS
Sorry competitors , we have beaten you again on the flatness and parallelism
Solutions Developed Specifically for Wafer Handling
As an emerging leader in technical ceramics for Semi Conductor industry, Werlchem LLC is gradually established her leadership in ceramic applications of Semi Conductor industry.
Our ultra-flat ceramic vacuum wafer chucks provided a reliable solution for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. We offer:
- Ultra-flat capabilities--flatness and parallelism is what gets us heret
- High stiffness---Uniform pore size and porosity
- Low thermal expansion---self formulated and processed ceramic powder
- Large size capability – 450 mm and beyond
- Extreme wear resistance---Even though it may mean you will only buy once form us in your life time..
- Customized orders are always not a problem and welcomed
From self formulated powder production and basic forming to precision finishing and measurement, Werlchem LLC produces high-quality, top-performance components. You'll find our materials:
- Reduce the effect of particulate contamination
- Offer ultra-clean purity
- Minimize wafer contact
- Resist corrosion in aggressive chemical cleaning
- Lithography
- Inspection
- Wafer cleaning
- Non-vacuum process chambers
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