Square Porous Ceramic Chuck Table (164*164mm)

Square Porous Ceramic Chuck Table (164*164mm) Drawing




















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ZERODUR

ZERODUR

ZERODUR® is a glass ceramic characterized by a phase of evenly distributed nano-crystals within a residual glass phase. It contains around 75 weight percent crystalline phase with a high quartz structure. The crystal structure has a negative linear thermal expansion, while the other glass phase has a positive linear thermal expansion. The material is adjusted in a way that the positive thermal expansion of the glass phase and the negative thermal expansion of crystal structure effectively neutralize each other. The crystals are typically only 50 nm in diameter, and ZERODUR appears reasonably transparent because the refractive indices of the two phases are almost identical. The most important properties of zerodur are:  Nearly zero thermal expansion Excellent homogeneity High internal quality Outstanding chemical stability Polishable to a high accuracy Good processing behavior Low helium permeability Figure 1&2 and table 1 give an overview of ZERODUR’s properties.  Figure 1: External transmittance curve of ZERODUR at sample thickness of 5 mm and 25 mm. Figure 2: Thermal expansion coefficient curve of ZERODUR as a function of temperature. Optical Properties Wavelength(um) 656.27 643.85 587.56 546.07 486.13 479.99 435.83 Designated Letter C C' d e F F' g Refractive Index 1.5394 1.5399 1.5424 1.5447 1.5491 1.5497 1.5544 AbbeNumber 56.1 55.9 Mechanical Properties and Chemical Properties Density(g/cm3) Poisson's Ratio KnoopHardness Young's Moduluds (GPa) AcidResistance Class AlkaliResistance Class ClimaticResistance Class StainResistance Class 2.53 0.24 620 90.3 1 1 1 0 Table 1:ZERODUR Properties Low Expansion Materials :   Fused Silica ZERODUR® Corning Low Expansion Glass, Pyrex® ULE® titanium silica glass, VYCOR® brand glass and CLERACREAM®-Z ZERODUR® is a registered trademark of Schott Glass Technologies.

DAD321 Porous Ceramic Chuck Table

Chuck Table for DAD321 Dicing Saw

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DAD641 Porous Ceramic Chuck Table

Chuck Table for DAD641 machine 6"

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All rights reserved by Werlchem LLC

Wafer lapping ,polishing ,thinning ceramic plate

Wafer lapping ,polishing ,thinning ceramic plate

Key Features 

· Material

   99.8% Alumina,high density,high hardness and good thermal conductitivity 

· Tolerance

   High flatness,parallelism ,roughness and micro constructure 

 

· Efficiency

   Contract manufacturing on associated variety of shapes,sizes and retain regular sizes in stock

 

· Cost   

    Total cost ownership commitment with swift responding,consistent cost reduction and overal design and development

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Thin Film or Wafer Carriers

Thin Film or Wafer Carriers

Sapphire material is now widely used in optical and semiconductor industry, with hardness second only to diamond and chemical and scratch resistance and thermal stability ,it is superior to other materials such as quartz.

Sapphire carrier are used to hold and transport thin film processing of silicon,GaAs other semiconductor wafers and flexible substrates.

All thin substrate carriers are ultra flat and can be supplied with or without custom perforated holes,other option of porous ceramic is also our expertise.

Current sizes are available typically from 2" to 12" dia with flatness and parallelism of 0.002-0.005mm, large size till 20 inches is also  successfully prototyped.

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WAFER-PIN-CHUCK

WAFER-PIN-CHUCK

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