Thursday, September 21, 2017

PLASMA CHEMICAL COATING-KEPLA-COAT

PLASMA CHEMICAL COATING-KEPLA-COAT

BASICS

KEPLA-COAT® is a plasma chemical coating that improves aluminium and titanium alloys.

Coating takes place in a saline solution electrolyte. The workpiece is connected in series to an external source of electricity and acts as an anode. During anodization oxygen plasma discharges itself on the workpiece surface and briefly melts the surface thus forming 2 oxide ceramic layers that bond tightly with the outer metallic layer. A barrier layer with a thickness of about 100 nm constitutes the direct bond with the aluminium or titanium workpiece. Then come an oxide ceramic layer with low porosity density followed by one with high porosity density. This layer bond protects the aluminium and titanium against wear and corrosion and, thanks to its surface structure, it allows the absorption of lubricants as well as following workpiece treatments such as, for instance, paintwork or impregnation.
Plasma Chemical Coating-KEPLA-Coat
 

PROPERTIES

KEPLA-COAT® layers applied to aluminuim consist of up to 60 percent of corundum. The remaining layer components are mainly Al2O3 and boehmite. Depending on the alloy of the coated workpiece, KEPLA-COAT® can reach a thickness of up to 150 µm. The layer thickness of structural aluminium components usually ranges from 40 to 60 µm. KEPLA-COAT® provides not only excellent wear protection, but also perfect uniform layer, dimensional accuracy and hardness. KEPLA-COAT®-coated substrates show a much greater fatigue strength than substrates with similar layers. These layers can resist aggressive gases such as chlorine and boron trichloride and a layer thickness of 30 μm, for instance, shows a corrosion resistance of more than 3,000 hours in the salt fog test according to DIN EN ISO 9227. In addition, KEPLA-COAT® ensures extremely good anti-friction properties in combination with PTFE or other dry lubricants.
Plasma Chemical Coating-KEPLA-Coat
All technical values published here are subject to the test conditions specified. We therefore empasise that the applications and operating conditions, along with the end user’s practical experience, will ultimately determine the level of performance achieved by the coating and/or coating system.

Thursday, August 6, 2015

Lintec Rad-2500 F8 SPL Wafer Mounter

Lintec Rad-2500 F8 SPL Wafer Mounter Chuck Table

8" inch ceramic chuck table 
12" inch ceramic chuck table


Monday, July 6, 2015

ACCRETECH/ TSK DICING MACHINE CHUCK TABLE

REPAIR OR REBUILD
ACCRETECH/TSK DICING MACHINE CHUCK TABLE

MACHINE MODLE

ACCRETECH / TSK 2500
ACCRETECH / TSK 88 A
ACCRETECH / TSK APM-5000
ACCRETECH / TSK APM-6000A
ACCRETECH / TSK APM-60B
ACCRETECH / TSK APM-90AL
ACCRETECH / TSK AWD-100A
ACCRETECH / TSK AWD-100A(M)
ACCRETECH / TSK AWD-10A
ACCRETECH / TSK AWD-110M
ACCRETECH / TSK AWD-200T
ACCRETECH / TSK AWD-208T
ACCRETECH / TSK AWD-300T
ACCRETECH / TSK AWD-4000A
ACCRETECH / TSK AWD-4000B
ACCRETECH / TSK AWD-5000
ACCRETECH / TSK AWD-5000A
ACCRETECH / TSK G-SL-534A-CX
ACCRETECH / TSK MSP 90A
ACCRETECH / TSK PSM-2000A
ACCRETECH / TSK UF 170
ACCRETECH / TSK UF 200 / 200A
ACCRETECH / TSK UF 200FL
ACCRETECH / TSK UF 200SFL
ACCRETECH / TSK UF 300/300A

www.chuck-table.com

Wednesday, June 17, 2015

End Effector---ceramic wafer arm

End effector (ceramic robot hand) constitute the end of the robot arm which handles and moves the semiconductor wafer between positions.  It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.



















www.chuck-table.com

Friday, June 12, 2015

SemiXicon

前工序工艺设备:
  • 光刻机: 佳能PLA-501F, 600.
  • PE-340,500,600系列
  • 分步重复光刻机STEPPER
  • ASML-Stepper 分步光刻机
    Ultratech Stepper Model 1700
  • 涂胶显影导轨: SVG 8600,8800
  • 刻蚀机: Tegal 900/901/903.
  • 去胶机Branson 3000,3100
  • 各种扩散炉
  • 化学气相沉积APCVD(WJ-999),PECVD, LPCVD
  • 溅射台3180, 3190, 3290
  • 蒸发台MARK-50.
  • 离子注入机 NV10160,GDS-80
  • 硅片探针: EG1034,EG2001,3001
  • 硅片腐蚀清洗设备: FSI-Titan
  • 兆声波清洗Verteq Meg-sonic,
  • 湿洗台Wetbench, Wet Etch                 
  • 清洗甩干机
  • 工艺参数测量设备:
  •    4点探针 FPP-5000,
       C-V 图示仪(电容/电压曲线测量仪)
       少数载流子寿命测试仪
       尘埃颗粒测量仪KLA Tencor5500,6200,SP1
       膜厚测试仪 Nanospec 180/181/210
       台阶仪:Tencor AlphaStep 200/300/500
    • 集成电路测试系统 MTI-1030 用于测试运放/比较器,电源管理器件,脉宽调制器件,稳压电源器件,音频器件,各类数字模拟混合电路
    • 分离器件测试系统ST5000E,ST5300HS 1000-2000V,50A-1200A,用于测试大功率MOSFET, IGBT,二极管,三极管,整流桥
    • 各种备品备件
后工序设备
  • 划片机,粘片机,压焊台,塑封机,机械手
    可靠性实验设备,漏气检验,离心实验机等
硅片生产设备:
  • 切片机, 磨片机
    抛光机 Siltek 3800/3806,  Speedfam 16/18/50
    硅片厚度平整度测试分选设备 ADE 8100, 7200, 9300, 9500, 9520, 9530, 9600
    硅片减薄机: 迪斯科 DISCO
    斯特拉斯Strasbaugh 7AA,
    GMN 2R400
    激光打标机, 激光识别机
    硅片腐蚀清洗机, 倒角机
    硅片表面检查魔镜

Friday, May 29, 2015

Tuesday, May 19, 2015

ZERODUR

ZERODUR
ZERODUR® is a glass ceramic characterized by a phase of evenly distributed nano-crystals within a residual glass phase. It contains around 75 weight percent crystalline phase with a high quartz structure. The crystal structure has a negative linear thermal expansion, while the other glass phase has a positive linear thermal expansion. The material is adjusted in a way that the positive thermal expansion of the glass phase and the negative thermal expansion of crystal structure effectively neutralize each other. The crystals are typically only 50 nm in diameter, and ZERODUR appears reasonably transparent because the refractive indices of the two phases are almost identical. The most important properties of zerodur are: 
  • Nearly zero thermal expansion
  • Excellent homogeneity
  • High internal quality
  • Outstanding chemical stability
  • Polishable to a high accuracy
  • Good processing behavior
  • Low helium permeability
Figure 1&2 and table 1 give an overview of ZERODUR’s properties. 
Figure 1: External transmittance curve of ZERODUR at sample thickness of 5 mm and 25 mm.
Figure 2: Thermal expansion coefficient curve of ZERODUR as a function of temperature.
Optical Properties
Wavelength(um)656.27643.85587.56546.07486.13479.99435.83
Designated LetterCC'deFF'g
Refractive Index1.53941.53991.54241.54471.54911.54971.5544
AbbeNumber56.155.9
Mechanical Properties and Chemical Properties
Density(g/cm3)Poisson's RatioKnoopHardnessYoung's Moduluds (GPa)AcidResistance ClassAlkaliResistance ClassClimaticResistance ClassStainResistance Class
2.53
0.2462090.31110
Table 1:ZERODUR Properties
Low Expansion Materials :  
ZERODUR® is a registered trademark of Schott Glass Technologies. 

Friday, May 15, 2015